Semiconductor Grinders
The DXSG320 machine can complete three processes of a production line: polishing / single-side grinding / single-side grinding. It is capable of simultaneously grinding both sides of a silicon wafer, and due to its single-wafer grinding capability, data for each wafer is traceable. Additionally, the DXSG320 supports automated wafer transportation in production lines, offering significant advantages over polishing machines and grinding discs.
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Specifications
Specifications
| Grinding Capacity |
Notch & Orientation Flat |
| Grinding Capacity (Outer Diameter) |
Ø 200 mm, Ø 300 mm |
| Grinding Wheel (Diameter) |
Ø 100 mm, Ø 160 mm |
| Throughput |
Within 120 sec. |
| GBIR |
Within 2.0 µm |
| Thickness |
Within ± 2 µm |
| Machine Weight |
5,000 kg |